Spectroscopic ellipsometers are capable of measuring thin film thicknesses ranging from 1 Å to > 30 µm for single and complex multi layer thin films. Materials have to be transparent or semi-transparent. Due to the strong absorption of metal and ceramic films, thickness measurement of such materials are limited to less than 0.3 µm thick.

Sample mapping for film thickness uniformity

By the simple use of an automated XY sample stage it is possible to map thin film thickness uniformity over the complete sample structure.