
Plasma Profiling TOFMS
Optoelectronics
Rare earth doped ZnO
An example of depth analysis by PP-TOFMS of rare earth doped materials: codoped Eu and Tb ZnO thin layers developed for making white LEDs is given in the application note. Correlation between depth profiles and photoluminescence is made and used to explain annealing effect.
Application Notes

- PPTOF 01 : PP-TOFMS Depth Profiling of ZnO Thin layers co-doped with Rare Earths for Photonic Materials
- Depth Profile of a ZnO thin film on Si co-doped with Tb and Eu. (Collaboration with CIMAP, University of Caen)
- A. Ziani, A. Tempez, C. Frilay, C. Davesnne, C. Labbé, Ph. Marie, S. Legendre and X. Portier, Concentration determination and activation of rare earth dopants in zinc oxide thin films, Physica Status Solidi, C 1-4 (2014). DOI: 10.1002/pssc.201300636
- Multidimensional Depth Profile Analysis of Oxide Layers by Plasma Profiling Techniques: GD-OES and PP-TOFMS Proceedings of SPIE Photonics (International Society for Optics and Photonics) SPIE 8626, Oxide-based Materials and Devices IV, 862608 (March 18, 2013). DOI:10.1117/12.2010085