
Digital Mass Flow Controller SEC-R100 Series
Übersicht
Digital Mass Flow Controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage , analytical, etc.
High accuracy (+/-1.0% S.P.) and performance without high cost semiconductor industry options. Has multi gas/multi range function for the nine most popular gases.
Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available.
Merkmale
- Multi Gas / Multi Range*
- User can change Gas type and Full scale range with free software
- Reduce stock
- Increased flexibility
- High Accuracy ±1.0% S.P.
- ≦1 second response across the full flow rate range
- High performance Solenoid Valve
- O-ring material - Viton™
- Fittings - ¼” Swagelok equivalent
- Digital / Analog communication
- Profibus DP-V0
- Analog 0-5, 0-10 VDC,4-20mA
- 24 V DC power supply
- RoHS compliant
*Gas selection from nine gases
Hergestellt von HORIBA STEC
Spezifikationen
Model Name | SEC-R116 | SEC-R126 |
---|---|---|
Full-scale flow rate | < 10LM | < 50LM |
Compatible gas | N2, O2, Air, H2, He, CH4, C3H8, Ar, CO2 | |
Flow rate control range | 2-100%F.S. | |
Accuracy | ±1.0%S.P (Flow rate >30%F.S.)± 0.3%F.S. (Flow rate ≦ 30%F.S.) | |
Operation temperature | 5 to 50 (recommended temperature range: 15 to 45℃) | |
Response | ≦ 1second over full flow rate range | |
Valve type | Normally Closed | |
Linearity | within +/- 0.5% of F.S. | |
Repeatability | within +/- 0.2% of F.S. | |
Power | 24VDC (13 to 32VDC)7.5VA | |
Digital | Profibus DP-V0 | |
Analog | 0-5(10)VDC, 4-20mA | |
Standard fitting | 1/4” Swagelok equivalent | |
Leak integrity | ≦1×10-10Pa・m3/s | |
MAX. Operating pressure | 450kPa (G) | |
Operating differential pressure | 50 to 300kPa (d)>3LM:100 to 300kPa (d) | 200 to 300kPa (d) |
Wetted materials | SUS316L, PTFE, Elastomer, Magnetic Stainless steel and Fluoro Rubber |
The precision is that associated with the full-scale MR and MG number values. The flow rate precision guaranteed temperatures confirm to SEMI standard. For details, please contact us.