Carbon Sensor Conductivity Meter HE-960LC


Can measures conductivity of low concentration. Its dual calculation circuits and software, combined with carbon sensors, enable measurements ranging without switching. The HE-960LC can be used as a process concentration meter, and also to monitor changes in the concentration of specified chemicals.


  • Wide range compatibility:
        0 - 1000 μS/cm, 0 - 10000 μS/cm (Sensor FS-07F).
  • Automatic display range switching
  • Accommodates various types of temperature compensation
  • Concentration conversion function 
  • Chemical resistant two-electrode carbon sensor

Hergestellt von HORIBA Advanced Techno


Specificationd of HE-960LC



Measurement range

0 - 1000 μS/cm (cell constant: 0.1/cm)*

0 - 10000 μS/cm (cell constant: 1/cm)*


Cell constant



0 to 1000 µS/cm

+/- 0.5% FS


0 to 2000 µS/cm


+/- 0.5% FS

2000 to 10000 µS/cm


+/- 0.5% FS

0.0 to 100 deg.C

+/- 0.5 deg.C

* Measurement range of raw conductivity


Dimensions of HE-960LC


  • Chemical leak sensor of cooling water in the chiller.
  • Chemical concentration monitoring in the chemical blending tank.


  • Technical Article

Conductivity Meter with Carbon Electrodes and Application for Densitometers Technologies for a Practical Densitometer (1.8MB)

"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."