Digital Liquid Mass Flow Meters XF-100 Series


The XF series is digital liquid mass flow meter achieving high-speed response by using differential-pressure measurement method: 100 msec ( or less than 0.8 sec when it is used in combination with a piezo valve).


  • High speed response by using differential pressure measurement method
    100 msec (or less than 0.8 sec when it is used in combination with a piezo valve)
  • High Accuracy : +/- 0.8% F.S.
  • Ultra clean

Hergestellt von HORIBA STEC


XF-100 Series Schematics


The PE-D20 control unit integrates high frequency functions via the front panel controls.
The PE-D10 is a standalone unit for use with mass flow meters.
The PE series of dedicated power sources can be used as drive power sources for mass flow controllers, meters, and auto pressure regulator as well as for dedicated display units, and supply the standard flow rate setting voltage. The series includes a lineup of models that have flow rate alarm output function, models offering 0 signals and 4 to 20mA, and models that are capable of driving up to six units.
Display unit DU series
The DU-102E and DU-103K display the flow rate output signal from mass flow controllers and meters. Matching these units to the full-scale flow rate values of mass flow controllers and meters enables direct monitoring of control and measured flow rates.