Mass Flow Controller & Meter Comparison
HORIBA has a wide range of mass flow controllers suitable for a variety of solutions and applications. Our extensive range of mass flow meters can be seen below. This table has been provided as a guide for selection purposes and details the product specification of our gas flow meters and controllers. For further information regarding our variety of mass flow controllers and meters please visit the product line page.
HORIBA offer industry leading pressure insensitive mass flow modules, mass flow controllers for use up to 120°C, digital and analog communication, rerangeable and user configurable mass flow controllers and meters plus a wide range of accessories.
If you would like to discuss product options further, please contact us to speak to an expert.
Download the Mass Flow Controller (MFC) comparison chart here.
Model |
Main Product Features | Range topping accuracy and repeatability. Widest dynamic control range of 0.2% to 100%. Self diagnostics. Programmable, pressure insensitive mass flow module | High accuracy and repeatability. Programmable, pressure insensitive mass flow module | Widest used programable mass flow controller and meter |
Sensor Type | Pressure-based | Thermal | Thermal |
Accuracy | +/- 1% S.P. (>5% F.S.) | +/- 1% S.P. (> 25% F.S.) | +/- 1% S.P. (> 25% F.S.) |
Power Supply | +/-15 VDC/24 VDC*1 | +/- 15VDC | +/- 15VDC/24 VDC*1 |
Control Interface | Analog (0 - 5 VDC) / Digital (RS-485 F-NET) | Analog (0 - 5 VDC) / Digital (RS-485 F-NET) DeviceNET™ | Analog (0 - 5 VDC) / Digital (RS-485 F-NET) DeviceNET™ |
Pressure Reading | Yes | Yes | No |
Multi Gas/Multi Range | Multi Gas/Multi Range /Multi Pressure | Multi Gas/Multi Range | Multi Gas/Multi Range |
Self Diagnostics | Yes | No | No |
Fitting | VCR, IGS | VCR, IGS | Swagelok, VCR, IGS |
Seal Material | Metal | Metal | Metal or elastomer |
Valve Type | Piezo electric - Normally closed | Piezo electric - Normally closed and Normally open | Piezo electric - Normally closed and Normally open |
Mounting Orientation | Mount-free | Mount-free | Mount-free |
Full Scale Flow Rate | 10 SCCM - 50 SLM | 10 SCCM - 200 SLM | 10 SCCM - 500 SLM |
Operating Temperature | 15 - 45°C | 5 - 50°C | 5 - 50°C |
Model |
Main Product Features | Value line programable mass flow controller and meter | Value line single gas mass flow controller and meter | High Temperature Mass Flow Controller |
Sensor Type | Thermal | Thermal | Thermal |
Accuracy | +/- 1% S.P. (> 30% F.S.) | +/- 1% F.S. | +/- 1% S.P. (> 30% F.S.) |
Power Supply | +/- 15V/24VDC*2 | +/- 15VDC | +/- 15VDC/24 VDC*1 |
Control Interface | Analog (0 - 5 VDC) / Digital (RS-485 F-NET) | Analog (0 - 5 VDC) | Analog (0 - 5 VDC) / Digital (RS-485 F-NET) DeviceNET™ EtherCAT® |
Pressure Reading | No | No | No |
Multi Gas/Multi Range | Multi Gas/Multi Range | No | No |
Self Diagnostics | No | No | No |
Fitting | Swagelok, VCR | Swagelok | Swagelok, VCR |
Seal Material | Metal or elastomer | Elastomer | Metal |
Valve Type | Solenoid - Normally closed | Solenoid - Normally closed | Piezo electric - Normally closed and Normally open |
Mounting Orientation | Mount-free | No | Mount-free |
Full Scale Flow Rate | 10 SCCM - 1000 SLM | 10 SCCM - 200 SLM | 5 SCCM - 150 SLM |
Operating Temperature | 5 - 50°C | 5 - 50°C | 15 - 120°C |
*1 24 VDC is available for DeviceNet™ and EtherCAT® models.
*2 24 VDC is available for DeviceNet™, CC-Link®, EtherCAT®and PROFIBUS™ models.
This table is a guideline only. Some models vary. Please see product specification sheet for more details.