In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
Overview
Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capibility of cleanliness with all PFA sensors. Measurement range: 0 - 50%.
Features
- Wide range measurement, from low concentration to undiluted liquid. Measurement range: 0 - 50%.
- High precision measurement by the auto-correction range switching function.
- All PFA sensors, ideal for semiconductor processing
- 24 V DC power supply
- RoHS compliant
Manufactured by HORIBA Advanced Techno
Specifications
Model name | HF-960EM |
---|---|
Measurement range | HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm |
Repeatability | +/- 0.5% F.S. (in equivalent input) |
Linearity | +/- 0.5% F.S. (in equivalent input) |
Transmission output | Number of output: 4 |
Contact output | Outputs: 5 points |
Contact input | Inputs: 2 points |
Communication output | RS-485 |
Power supply | DC 24 V +/- 10% 15W |
Compatible sensor | CM-520 Series |
Wetted material of sensor | PFA |
Applications
- HF concentration moitoring for the Oxide etching proces, bare wafer to the finest etching process.