Industrial resistivity meter HE-960RW
Overview
This resistivity meter is ideal for such applications as the high-precision water monitoring employed at ultra-pure water plants used in semiconductor manufacturing.
They utilize newly designed, high-precision, high-stability temperature measurement circuitry and a vastly improved temperature compensation function, an important element for measuring the resistivity of ultra-pure water.
Features
- Highly precise, highly stable temperature compensation function
Control fluctuations in measured values in the region of 18 MΩ·cm resistivity to within a minimum 0.02 MΩ·cm over a water temperature range of 15 °C to 35 °C. - 50 m extension possible for sensor cables
- 2-channel simultaneous measurement
- Independent 4 contact alarms
- Abundant in-house calibration equipment
•HORIBA Advanced Techno resistivity meters are only shipped after cellconstant inspection is performed on the resistivity sensors and inspectionfor temperature sensor instrumental errors is implemented using calibration equipment that has been adjusted with high-traceability reference equipment.
•The sensors can also be combined with a converter for integrated calibration in advance of shipping. - Communication device ability (RS-485)
- Utilization of lead-free solder
Manufactured by HORIBA Advanced Techno
Specifications
Model | HE-960RW |
---|---|
Sensor input | 2-channel |
Cell constant | Approx. 0.01 /cm |
Temperature compensation element | Pt 1000 Ω (0 °C) |
Measuring range | Resistivity : 0 to 2.00 / 20.00 / *100.0 MΩ·cm |
Temperature : 0 to 100 °C | |
Repeatability | within ±0.1% of the full scale (in equivalent input) |
Linearity | within ±0.1% of the full scale (in equivalent input) |
Transmission output | 2 output points, Max. load resistance: 900 Ω
(Negative terminals of each transmission output channel are connected inside and thus have the same electric potential.) |
Contact output | 4 output points; Alarm contact output (R1, R2, R3, R4) |
Communication output | RS-485 |
Calibration function | Specific resistance |
Ultra-pure water Specific | 18.23 (standard), 18.18, 18.24 MΩ·cm |
Temperature compensation | Temperature compensation for ultra-pure water and impurities |
Temperature compensation range | 0 to 100 °C |
Ambient environment | Temperature: -5 °C to 45 °C, Relative humidity: 20% to 85% (without dew condensation) |
Power supply | 100 to 240 V AC ±10%, 50/60 Hz, 15 VA (max) |
Protective Structure | Panel : IP65, Rear case : IP20, Terminal : IP00 |
Weight | Approx. 550 g |
Compliance | CE marking FCC Part15 |