IT-470F-H Built-in type Non-Contact Infrared Thermometer

Overview

The IT-470F-H is a built-in type, non-contact infrared thermometer with industry-leading accuracy. It contributes to improve process stabilization, for which requires high accuracy temperature measurement, such as semiconductor and FPD production.

Features

Absolute high measurement accuracy ±0.1°C* and superior repeatability(2σ) of 0.1°C*.

*Actual value, under given conditions.

Application

For semiconductor and FPD production which requires high accuracy temperature measurement

In case of a susceptor is in a vacuum chamber
Temperature measurement of a susceptor is possible from outside of a chamber through the window
In case of surface temperature measurement of liquid crystal substrate in FPD production process.
As non contact measurement, surface is not damaged.
In case of temperature controlling in polishing
As non contact measurement, surface is not damaged.

Manufactured by HORIBA

Specifications

Measurement wavelength	8 to 14µm
Measurement temp. range	-50 to 200℃
Output resolution	Optical digital output: 0.1℃ Current output ≤0.025%FS
Accuracy* (Optical digital output)	±4.0℃ (Object temperature -50℃) ±0.8℃ (Object temperature -20℃) ±0.6℃ (Object temperature 0℃) ±0.5℃ (Object temperature 23℃) ±0.4℃ (Object temperature 100℃〜) (Linear interpolation is applied for the mid-points of object temperature and interpolated data are rounded to one decimal place.)
Repeatability (Optical digital output)	0.7℃ (Object temperature -50℃) 0.5℃ (Object temperature 23℃) 0.5℃ (Object temperature 200℃) (In case of the emissivity = 1.000 and use the 2σ value of 10 times measurement)
Response time (Optical digital output)	Optical digital output: ≤1.4 sec (running average 1 sec, at 95% response)
Data sampling period	0.1 sec
Display update period	Optical digital output: 0.2 sec Current output: 0.1 sec
Measuring diameter	Φ8mm/Distance 150mm (incident light amount 90%)
Emissivity setting	0.001 to 1.000 changeable (Setting at factory shipping)
Operating temp. & humidity	0 to 55℃, 35〜85%RH (no condensation)
Power	DC24V±5%
Function	Optical digital output (JIS F05) Current output 4 to 20ｍA (Load resistance 100Ω, non-isolated)
Dimensions	55×44×96mm　Power, Current cable attached (Standard length 2m)
Mass	≤300g

*Condition: Operating temperature 24 to 29℃ (include temperature of attachment), Humidity 55±20%, Emissivity correction setting 1.000.