Large Flow Liquid Source Vaporization Control System LE Series
Overview
A high-flow high-efficiency liquid vaporizer with flow channels and heater elements embedded in a cast aluminium block to ensure maximum heat transfer and the elimination of cold spots / condensation risk. Can operate up to 300 deg C. and vaporize up to 30g/min of IPA (or equivalent).
Features
- Innovative design maximizes vaporization rate
- New injector nozzle ensures consistent liquid injection which contributes to stable vapor output concentration
- All stainless steel, fully swept flow path for maximum corrosion resistance and minimum particulate generation
- Compatible with many types of precursors materials
Manufactured by HORIBA STEC
Specifications
Application liquid | H2O/IPA/TEOS/SiCl4 |
Maximum vaporization volume (gas flow rate) | H2O : 10g/min (12.4 SLM) |