Mixed Injection System Liquid Vaporizer MV-2000 Series
Overview
The MV-2000 Series achieves stable vaporization even at low temperatures by a new tornado flow method. This is suitable for vaporization of liquid sources which are used in semiconductor manufacturing such as "High-k", a liquid source which is pyrolyzed easily.
Features
- Stable vaporization at low temperature by a new tornedo flow method.
- Higher flow rate vaporization (add the stability data)
- Can vaporize a liquid source which is pyrolyzed easily
Manufactured by HORIBA STEC
Specifications
Model | MV-2000 |
---|---|
Liquid Material | All liquids except those corrosive to stainless steel(ex. HCl, HF) |
Setting Temperature | By vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C) |
Leak Integrity | ≤ 1 × 10-8 Pa·m3 /s (He) |
Internal leak standard | ≤ 1 × 10-6 Pa·m3 /s (He) |
Wetted parts | SUS316L , PFA |
Temperature Sensor | Thermocouple type K (CA) |
Pressure Resistance | 1MPa (G) |
Standard Fitting | Liquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male |
Operating Temperature | 15 - 50 ˚C |
Option | Air valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) ) |
- The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
- The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.