Thermal Mass Flow Module SEC-Z700S Series
Overview
Recognizing a market need for a device that has both EtherCAT® connectivity and a user-adjustable response, HORIBA has introduced the Z707S Series.
Based on the successful Z700 Pressure Insensitive model, the Z707S offers users improved accuracy and an operating range from 0.5% to 100% of full scale. Also, by applying a command signal, the response time can be adjusted anywhere from 300ms to one second, enabling a new level of process control.
Features
- Tunable Response: 300mS to 1 second
- Multi-Gas Multi-Range
- Enhanced Flow Accuracy:
+/- 1% Setpoint from 5-100% Full Scale, +/-0.05% Full Scale from 0.5-5% - Wide Dynamic Range: 0.5% to100%
- Low Seat Leak Rate: < 0.1% Full Scale
- High Operating Temperature up to 60C
- Actual gas accuracy: +/- 1% Setpoint from 10-100％ Full Scale
Manufactured by HORIBA STEC