Monitoring of Airborne Molecular Contamination in Clean Room of Electronics Industry
| Model | Analyzer unit: APNA-370 Converter unit: CU-2 |
| Principle | Oxidationcatalyst + Chemiluminescence |
| Range | 0-(0.1/0.2/0.5)/1 ppm or 0-1/2/5/10 ppm |
| Min. detectable sensitivity | 5 ppb |
| Repeatability | ±2.0%of F.S. |
| Linearity | ±2.0% of F.S. |
| Zero drift | ±2.0% of F.S./day |
| Span drift | ±2.0% of F.S./day |
| Sample gas flow rate | Approx. 3.0L/min |
| Indication | Measuring value, alarm |
| Alarms | APNA-370: Calibration error, Battery error, Flow rate error, Pressure error, Converter temperature error, Power failure CU-2: Catalyzer temperature error |
| Input/output | 0-1V, (2 lines from instant value, and integrated value or average value) Contact inputoutput (range, mode, external reset, telemeter failure, alarm, etc.) RS-232C (option) |
| Power | 100/110/115/120/220/230/240 VAC, 50/60 Hz APNA-370: approx. 200VA CU-2: approx. 200VA |
| Dimensions | APNA-370: 430(W) x 550(D) x 221(H) mm CU-2: 430(W)x450(D)x310(H) mm |
| Mass | APNA-370: approx. 21kg CU-2: approx. 20kg |
