CS-700

High Precision, High Stability Chemical Concentration Monitor CS-700

High Precision, High Stability Chemical Concentration Monitor

This is a chemical concentration monitor capable of accurately measuring the concentration of each component in mixed solutions used in the semiconductor manufacturing processes.

Ideal for controlling multi-component chemicals, including trademarked chemicals. It contributes to enhanced quality control in semiconductor manufacturing processes while improving the accuracy of chemical management.

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CMulti Component

Segment: Semiconductor
Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

Compatible with multi-component chemicals

Accurate measure mixtures of up to eight components of chemicals can be taken.

Zero reagent requirements

Since component separation is accomplished through an optical measurement method without the need for reagents, it also contributes to cost reduction in the production process.

Measurement Range and Repeatability

Unit : mass%

 ComponentMeasurable rangeRepeatability
1st solutionHNO330.0 - 34.0±0.5
HF2.00 - 4.00±0.10
H3PO435.0 - 39.0±0.6
H2SiF60.00 - 3.00±0.50
H2O25.0 - 33.0±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

 

itemCS-100CS-700
Measurement principleAbsorption spectroscopic methodAbsorption spectroscopic method
Sample temperature20 to 30 Degree C20 to 30 Degree C
Ambient temperature20 to 25 Degree C20 to 30 Degree C
ComponentsMax. 4 componentsMax. 8 components
Chemical rangeMax. 4 rangesMax. 6 ranges
CommunicationParallel I/O, Analog output, RS-232CParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 componentsMax. 6 components
Dimension205(W) X 329(D) X 269(H)mm218(W) X 391(D) X 213(H)mm
Power sourceDC 24VDC 24V(Same connecter of CS-100)
Consumable partsHalogen lampHalogen lamp (Same as CS-100 type)
WavelengthUV/NIRUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz,PTFE, PFA, Sapphire,
Kalrez 4079 O-ring

Schematics

Informationsanfrage

Sie haben Fragen oder Wünsche? Nutzen Sie dieses Formular, um mit unseren Spezialisten in Kontakt zu treten.

* Diese Felder sind Pflichtfelder.

Related products

CombiScope
CombiScope

AFM and inverted light microscopy

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HT-110
HT-110

On-line TOC analyzer

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

OmegaScope
OmegaScope

The AFM optical platform

OPSA-150
OPSA-150

Organic pollutant monitor

SLIA-300
SLIA-300

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

SLIA-5000
SLIA-5000

Silica analyzer

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

TRIOS
TRIOS

Versatile AFM Optical Coupling

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

UP-100
UP-100

Micro Volume pH Monitor

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation type MLSS meter

HU-200TB-H
HU-200TB-H

Field-installation type turbidity meter

HU-200TB-IM
HU-200TB-IM

Field-installation type turbidity/SS meter

HU-200TB-W
HU-200TB-W

Field-installation type turbidity meter

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic pollutant monitor

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

U-50
U-50

Multi-parameter water quality checker

Corporate