Pressure Insensitive Mass Flow Module
This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.
The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal.
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"Recently, with the increase of application of a semiconductor device according to IoT, the latest semiconductor factories are focusing to minimize the downtime of the apparatus. Therefore, for the purpose of failure pre-detection of semiconductor tools and its components, the managed parameters of semiconductor process are increased, and its specification is getting tighter. In order to satisfy the required control criteria, the mass flow control module is required to have high-speed communication and failure pre-detecting function as well as flow rate accuracy and reproducibility, inlet pressure insensitivity performance. D507 series is lined up on D500 series to meet strict management at recent semiconductor factory."
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