
High Temperature Digital Mass Flow Controller
The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.
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Control Unit
Conversion Adapters
Dedicated power sources
Display Unit
Mass Flow Checker
Monitor Unit
Setting Units
Exhaust Pressure Controller
Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
POCl3 Auto Refill System
Mixed Injection System Liquid Vaporizers
Residual Gas Analyzer
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
Digital Automatic Pressure Regulator
Pressure Insensitive Mass Flow Module
Digital Liquid Mass Flow Meters / Controllers
Compact Baking System
POCl3 Auto Refill System
Mixed Injection System Liquid Vaporizers
Pitot Tube Flow Meter
Dual Pitot Tube Flow Meter
Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
New concept Pressure Insensitive Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Digital Liquid Mass Flow Meters / Controllers
Mass Flow Controller
Mass Flow Controller
Digital Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
New concept Pressure Insensitive Mass Flow Controller
Pressure Insensitive Mass Flow Controller