Semiconductor

Semiconductor

HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

Browse Semiconductor Divisions

Fluid Control

Fluid Control

Fluid Control Systems

Fluid Control System

Dry Process Control

Dry Process Control

Wet Process Control

Wet Process Control

Metrology

Metrology

Features

Hideyuki Koishi, President of HORIBA STEC

A Critical Subsystem Supplier’s Response to COVID-19

Hideyuki Koishi, president of HORIBA STEC, Co., Ltd., a leading supplier of mass flow controllers (MFCs), one subsystem critical to semiconductor production, recently spoke with SEMI about the company’s response to the COVID-19 outbreak, the pandemic’s impact on the global supply chain and the company’s ability to meet the demand for MFCs.

Read more

CRITERION D500

Pressure Insensitive Mass Flow Module

This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.

The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. 

more

Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

more

High Precision, High Stability Chemical Concentration Monitor

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
 By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
 Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

more

Dissolved Oxygen Monitor in Low Concentration HF HD-960L

High stability measurement dissolved oxygen in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

more

Reticle / Mask Particle Detection System PR-PD2HR

The HORIBA PR-PD2HR Particle Detection System inherits it's high-performance functions from the reticle/mask particle detection PD series which is proud of its high availability and long-term stability. At the same time also increasing the S/N ratio by more than three times and dramatically improving operating sensitivity.

more

Upcoming Semiconductor Events

Browse Products

CRITERION D500
mehr CRITERION D500

Pressure Insensitive Mass Flow Module

CS-100 Series
mehr CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
mehr CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
mehr CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
mehr CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
mehr CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
mehr CS-900

Non-Contact Chemical Concentration Monitor

DZ-100
mehr DZ-100

Ultra-thin Mass Flow Controller

EC-5000 Series
mehr EC-5000 Series

Exhaust Pressure Controller

EV 2.0 Series
mehr EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
mehr EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

FS-3000
mehr FS-3000

Thermal Flow Splitter

GR-300 Series
mehr GR-300 Series

Wafer Back Side Cooling System

HD-960L
mehr HD-960L

Dissolved Oxygen Monitor in Low Concentration

HE-480C-GC
mehr HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R(W)
mehr HE-480R(W)

Industrial resistivity meter

HE-960CA
mehr HE-960CA

Citric Acid Monitor

HE-960H-TM
mehr HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
mehr HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
mehr HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
mehr HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
mehr HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
mehr HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
mehr HE-960RW-GC(W)

2-Channel Resistivity Meter

HE-960TM
mehr HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

HF-960EM
mehr HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
mehr HF-960H

HF / HCl Concentration Monitor

HF-960M
mehr HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
mehr HF-SP-CU

2-channel High Precision HF Concentration Monitor

HP-480(W)
mehr HP-480(W)

Industrial pH meter

HZ-960
mehr HZ-960

Dissolved Ozone Monitor

IR-200
mehr IR-200

Gas Monitor for Chamber Cleaning End Point Monitoring

IR-300
mehr IR-300

Vapor Concentration Monitor

IR-400
mehr IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

LE Series
mehr LE Series

Large Flow Liquid Source Vaporization Control System

LEM Series
mehr LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

LF-F/LV-F Series
mehr LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
mehr LSC series

Compact Baking System

LU Series
mehr LU Series

Liquid Auto Refill System

LU-4000 Series
mehr LU-4000 Series

POCl3 Auto Refill System

MI-1000/MV-1000
mehr MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MICROPOLE System
mehr MICROPOLE System

Compact Process Gas Monitor

MU-2200
mehr MU-2200

Mixed Gas Generators MU Series

MV-2000 Series
mehr MV-2000 Series

Mixed Injection System Liquid Vaporizer

PR-PD2
mehr PR-PD2

Reticle/Mask Particle Detection System

PR-PD2BLI
mehr PR-PD2BLI

Blanks Mask Particle Detection System

PR-PD2HR
mehr PR-PD2HR

Reticle / Mask Particle Detection System

PR-PD3
mehr PR-PD3

Compact Reticle/Mask Particle Detection System

PR-PD5
mehr PR-PD5

Low-cost Reticle/Mask Particle Detection System

PV Series
mehr PV Series

Piezo Actuator Valve

RP-1
mehr RP-1

Reticle/Mask Particle Remover

RU-1000
mehr RU-1000

Plasma Emission Controller

SEC-400 Series
mehr SEC-400 Series

Mass Flow Controller

SEC-8000 F/D/E Series
mehr SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
mehr SEC-E Series

Mass Flow Controller

SEC-N100 Series
mehr SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X
mehr SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
mehr SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

SLIA-300
mehr SLIA-300

Highly Sensitive Silica Monitor

TU Series
mehr TU Series

Test Gas Generation Systems

UP-100
mehr UP-100

Micro Volume pH Monitor

UR-Z700 Series
mehr UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
mehr VC Series

Direct Liquid Injection System

VG Series
mehr VG Series

Capacitance Manometer

XF-100 Series
mehr XF-100 Series

Digital Liquid Mass Flow Meters

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.