PR-PD3 BLI

PR-PD3 BLI

Particles on Blank Mask

The PR-PD3BLI enables high-throughput, blank mask particle detection down to 0.1μm ; multiple substrate materials blank mask inspection capability.

 

 

 

Segment: Semiconductor
Division: Metrology
Produktionsfirma: HORIBA, Ltd.
  • High sensitivity up to  0.1μm(100nm)
  • Variable sensitivity and throughput 0.1μm / 5.5min , 0.15μm / 2.75min, 0.2μm / 33 sec
  • Robustness
  • Low running cost

 Attribute

Specification Value

  

Inspection object

High speed and high accuracy inspection for blank masks

Dimensions

Approx. 2000 (W) x 1700 (D) x 2176 (H) mm
Approx. 78.7 (W) x 66.9 (D) x 85.7 (H) in

Detectable Particle SizePattern surface: 0.1 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)
Light Source WavelengthSolid State Laser 488 nm, 50 mW

 

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