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Fluid Control Systems

HORIBA is one of the leading providers of high performance vaporization systems. HORIBA’s liquid source vaporizers are used throughout the semiconductor manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizing system to meet your requirements. HORIBA have more than 30 years vaporizing knowhow using direct injection, mixed injection, bubbling and baking vaporization techniques.

HORIBA’s Liquid Source Vaporization Systems can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to HORIBA’s range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.

Some Liquid Materials HORIBA Has Experience With

Acetic Acid

Benzene

B(OCH3)3

BTBAS

C6F6

Cyclohexane

Decyl-TMOS

DPM

DPMS

Ethanol

Ge(OCH3)4

GeCl4

H2O

HCD

HDFDA

HMDS

HMDSO

i-Octane

IPA

Me-Cyclohexane

Methanol

n-Octane

OMCTS

OMTS

P(OCH3)3

PO(OCH3)3

SAM24

Si(CH3)4

Si(OCH3)4

SiCH3Cl3

SiCl4

SiH(OCH3)3

SiHCl3

Ta(OC2H5)5

TBTDETa

TDEAHf

TDEAT

TDMAS

TDMAT

TEB

TEMAHf

TEMAZr

TEOS

TEPO

THF

Ti(O-iPr)4

TiCl4

TMCTS

Toluene

1,3-DMA

Please contact us if you require vaporizing any liquid materials that are not listed above.

Browse Products

mehr LU Series

Liquid Auto Refill System

mehr LU-4000 Series

POCl3 Auto Refill System

mehr LSC series

Compact Baking System

mehr MU-2200

Mixed Gas Generators MU Series

mehr TU Series

Test Gas Generation Systems

Informationsanfrage

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