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Fluid Control

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.

Mass Flow Control

D500

Pressure Control

GR-200

Liquid Source Vaporization System

MV-2000

Gas Generator Systems

MU Series

Browse Products

mehr CRITERION D500

Pressure Insensitive Mass Flow Module

mehr DZ-100

Ultra-thin Mass Flow Controller

mehr EC-5000 Series

Exhaust Pressure Controller

mehr FS-3000

Thermal Flow Splitter

mehr GR-300 Series

Wafer Back Side Cooling System

mehr LE Series

Large Flow Liquid Source Vaporization Control System

mehr LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

mehr MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

mehr MV-2000

Mixed Injection System Liquid Vaporizer

mehr PV Series

Piezo Actuator Valve

mehr SEC-400 Series

Mass Flow Controller

mehr SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

mehr SEC-E Series

Mass Flow Controller

mehr SEC-N100 Series

Digital Mass Flow Controller

mehr SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

mehr SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

mehr UR-Z700 Series

Digital Automatic Pressure Regulator

mehr VC Series

Direct Liquid Injection System

mehr XF Series

Digital Liquid Mass Flow Meters

Informationsanfrage

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