Semiconductor Page Heading

Liquid Source Vaporization System

HORIBA is one of the leading providers of high performance vaporizers. HORIBA’s liquid source vaporizers are used throughout the semiconductor manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizer to meet your requirements. HORIBA have more than 30 years vaporizing knowhow using direct injection, mixed injection, bubbling and baking vaporization techniques.

HORIBA’s Liquid Source Vaporizers can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to HORIBA’s range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.

Related Products

MV-2000 Series
mehr MV-2000 Series

Mixed Injection System Liquid Vaporizer

LSC series
mehr LSC series

Compact Baking System

VC Series
mehr VC Series

Direct Liquid Injection System

LE Series
mehr LE Series

Large Flow Liquid Source Vaporization Control System

LU Series
mehr LU Series

Liquid Auto Refill System

XF-100 Series
mehr XF-100 Series

Digital Liquid Mass Flow Meters

LF-F/LV-F Series
mehr LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.