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Wet Process Control

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.

Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

Chemical Concentration Monitor


In-line pH Monitors


Ultra-Pure Water Monitor


Related Products

mehr CS-100 Series

Stand-alone Type Chemical Concentration Monitor

mehr CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

mehr CS-600F

Fiber Optic Type Chemical Concentration Monitor

mehr CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

mehr CS-700

High Precision, High Stability Chemical Concentration Monitor

mehr CS-900

Non-Contact Chemical Concentration Monitor

mehr HD-960L

Dissolved Oxygen Monitor in Low Concentration

mehr HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

mehr HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

mehr HE-480R(W)

Industrial resistivity meter

mehr HE-960CA

Citric Acid Monitor

mehr HE-960H-TM

Wide range TMAH Concentration Monitor

mehr HE-960H-TM-S

High Precision TMAH Concentration Monitor

mehr HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

mehr HE-960LC

Carbon Sensor Conductivity Meter

mehr HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

mehr HE-960R-GC(W)

Carbon Sensor Resistivity Meter

mehr HE-960RW-GC(W)

2-Channel Resistivity Meter

mehr HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

mehr HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

mehr HF-960H

HF / HCl Concentration Monitor

mehr HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

mehr HF-SP-CU

2-channel High Precision HF Concentration Monitor

mehr HP-480(W)

Industrial pH meter

mehr HZ-960

Dissolved Ozone Monitor

mehr SLIA-300

Highly Sensitive Silica Monitor

mehr UP-100

Micro Volume pH Monitor


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