Carbon Sensor Conductivity Meter
Ideal for the recovery of chemicals and pure water in semiconductor manufacturing and FPD (Flat Panel Display) manufacturing processes. By adopting a chemically resistant two-pole carbon sensor, it measures the conductivity of chemicals, making it suitable for the management of concentration, management of chemical dilution, and monitoring the recycling of ultrapure water during various processes.
Sensor with excellent chemical resistance
The sensor employs a chemically resistant two-pole flow-through carbon sensor, making it compatible with a wide range of chemicals used in semiconductor cleaning processes.
Metal contamination-free
With the use of a special carbon material as the electrode, there is no concern of metal contamination.
Wide-range compatible
Capable of measuring up to a maximum of 1000 μS/cm (measuring range of conductivity before temperature compensation).
Concentration conversion function
Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemicals.
| Model | HE-960LC | ||
|---|---|---|---|
| Measurement range | 0 - 1000 μS/cm (cell constant: 0.1/cm)* | ||
| 0 - 10000 μS/cm (cell constant: 1/cm)* | |||
| Repeatability | Cell constant | 0.1/cm | 1.0/cm |
| 0 to 1000 µS/cm | +/- 0.5% FS | - | |
| 0 to 2000 µS/cm | - | +/- 0.5% FS | |
| 2000 to 10000 µS/cm | - | +/- 0.5% FS | |
| 0.0 to 100 deg.C | +/- 0.5 deg.C | ||
* Measurement range of raw conductivity
Schematics
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