HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

A specific resistance meter ideal for monitoring the purity of ultra-pure water used in cleaning processes.

It accurately measures ultra-pure water during processes thanks to its microprocessor integration. This contributes to purity monitoring of ultra-pure water used as the final cleaning water for silicon wafers and other applications.

Segment: Semiconductor

Abteilung: Wet Process Control

Produktionsfirma: HORIBA Advanced Techno Co., Ltd.

High precision
Based on the temperature characteristics of ultra-pure water, the microprocessor calculates the temperature compensation coefficient and automatically converts it to a 25°C specific resistance.

High-precision temperature compensation
By using a platinum temperature sensor (Pt1000Ω) as the temperature compensation element, it allows for high-precision temperature compensation within the range of 0 to 100°C.

Abundant temperature compensation features
Allowing for temperature compensation options such as pure water, ultra-pure water with impurities, and user-defined temperature compensation, enabling temperature compensation tailored to the liquid to be measured.

Product name	Industrial resistance meter
Model	HE-480R
Measurement method	Electrode type (2-electrode method)
Cell constant	0.01 / cm
Temperature sensor specifications	Platinum resistance 1000 Ω / 0 °C
Measuring range	Measurement unit	kΩ·m	0 to 2.00	0 to 20.0	0 to 200.0	0 to 1000 *
	Measurement unit	MΩ·cm	0 to 0.200	0 to 2.00	0 to 20.00	0 to 100.0 *
	*: Measurable without temperature compensation
	Temperature: 0 °C to 100 °C (Select your desired decimal point from 0, 1, and 2 digits.)
Repeatability Within	± 0.5 % of the full scale (in equivalent input)
Linearity Within	± 0.5 % of the full scale (in equivalent input)
Transmission output	4 mA to 20 mA DC: input / output isolated type Maximum load resistance: 900 Ω Transmission output range: Freely selectable within the measurement range
Contact output	Outputs: 2 points Alarm contact output (R1 and R2) Contact type: relay contact, SPDT (1c) Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load) Contact function: selectable from upper / lower limit operation (ON / OFF control), alarm, and maintenance.
Transmission output hold feature	Previous value hold Optional value hold Continuous Selectable from the above (However, only the previous value hold is available in the maintenance Mode.)
Self-diagnosis function	Sensor diagnosis Out of the measurement range A/D converter scale over Converter error
Temperature compensation	Based on the temperature characteristics of extra deionized water (reference temperature: 25 °C) Based on the reference temperature and user-defined temperature coefficient (reference temperature: 5 °C to 95 °C) No temperature compensation
Temperature - compensated range	0 °C to 100 °C
Power supply	Rated voltage 100 V to 240 V AC, 50 / 60 Hz, 10 VA (max.)
Structure	Indoor-use panel installation type Panel: IP65 dust and water proof structure
Protective structure	Panel: IP65 (IEC60529, JIS C0920)
Conforming standards	CE Marking FCC Rule
External dimensions	48 (W) mm x 96 (H) mm x 115 (D) mm Case depth: approx. 105 mm (when panel-mounted)
Mass	Approx. 400 g
Compatible sensors	ERF-series, cell constant 0.01 / cm