Semiconductor/Flat Panel Display (FPD)

Since providing chemical concentration monitors to the marketplace in 1995, HORIBA has developed a wide range of analyzers for wet processes using its proprietary technologies. In the area of chemical concentration monitors, we have always taken the lead in the times by establishing the world's top market share. HORIBA's lineup of high-precision and high-stability meters that follow the evolution of semiconductor devices is capable of responding to customer demands as a total solution supplier in liquid measurement, from state-of-the-art to legacy processes.


Chemical Concentration Monitor 《CS Series》

CS-900
mehr CS-900

Non-Contact Chemical Concentration Monitor

CS-620F
mehr CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
mehr CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-600F
mehr CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-100 Series
mehr CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
mehr CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

HF Concentration Monitor 《HF Series》

Panel Mount Type ≪48/96 Series≫

HE-960RW-GC(W)
mehr HE-960RW-GC(W)

2-Channel Resistivity Meter

HE-480R(W)
mehr HE-480R(W)

Industrial resistivity meter

HF-960M
mehr HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-960H
mehr HF-960H

HF / HCl Concentration Monitor

HF-960EM
mehr HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HE-960H-TM-S
mehr HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960H-TM
mehr HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960LF / FS-09F-1/2
mehr HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

HE-960R-GC(W)
mehr HE-960R-GC(W)

Carbon Sensor Resistivity Meter

HE-960HC
mehr HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-480C-GC
mehr HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960LC
mehr HE-960LC

Carbon Sensor Conductivity Meter

HZ-960
mehr HZ-960

Dissolved Ozone Monitor

HD-960LR
mehr HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

HD-960L
mehr HD-960L

Dissolved Oxygen Monitor in Low Concentration

HE-960TM
mehr HE-960TM

TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

Micro Volume pH Monitor

UP-100
mehr UP-100

Micro Volume pH Monitor

Other Lineups

Benchtop / Handheld / Pocket Water Quality Meters《LAQUA》

LAQUA Benchtop Water Quality Meters



Water quality analysis is repeatedly performed in laboratories on a daily basis. Our high-end benchtop meters were developed to provide simplicity with excellent on-site usability - from operation and maintenance through to troubleshooting.

LAQUA Handheld Water Quality Meters



In the field, in the lab or anywhere you need it. Designed for use with one hand and with an IP67 waterproof rating and shock-resistant casing, this meter can be used for long periods, even in dark places, making it ideal for field measurements in rivers and lakes.

LAQUAtwin Pocket Water Quality Meters


Your lab-in-a-pocket. HORIBA's unique pocket meter integrates the electrode, display and sample container to enable simple, effective on-site testing by direct measurement from a single drop.

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