Ultrapure Water

Ultra-pure water is a high-purity water that minimizes impurities and brings them closer to H2O as much as possible. It is used in a variety of applications, including cleaning processes for semiconductor devices and flat panel displays (FDPs), and steam generators for power generation turbines. This ultrapure water is then manufactured through many processes, including demineralization, ion exchange, and multiple membrane treatment. HORIBA offers a wide lineup of high-precision meters required for the production and purity control of ultra-pure water in a wide range of applications.


Pole/Wall Mount Type (On-site Installation) ≪H-1 Series≫

HE-200R
mehr HE-200R

Field-installation Type Electric Resistivity Meter (Four-Wire Transmission)

HE-300R
mehr HE-300R

Field-installation Type Electric Resistivity Meter (Two-Wire Transmission)

HE-200C
mehr HE-200C

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-300C
mehr HE-300C

Field-installation Type Electric Conductivity Meter (Two-Wire Transmission, For Low-concentration)

HE-200H
mehr HE-200H

Field-installation Type Electric Conductivity Meter (Four-Wire Transmission, For High-concentration)

Panel Mount Type ≪48/96 Series≫

HE-480R
mehr HE-480R

Panel-mount Type Resistivity Meter(Four-Wire Transmission)

HE-960RW
mehr HE-960RW

Panel-mount Type Resistivity Meter(Four-Wire Transmission, 2-channel)

HE-480C
mehr HE-480C

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-960CW
mehr HE-960CW

Panel-mount Type Conductivity Meter (Four-Wire Transmission, 2-channel)

HD-960L
mehr HD-960L

Dissolved Oxygen Monitor in Low Concentration

HE-480H
mehr HE-480H

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Low-concentration)

HE-960HI
mehr HE-960HI

Panel-mount Type Conductivity Meter (Four-Wire Transmission, For Wide Range)

Silica Monitor

SLIA-300
mehr SLIA-300

Highly Sensitive Silica Monitor

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