Characterization of DNA sensor pads using UVISEL Spectroscopic phase modulated Ellipsometer

Characterization of DNA sensor pads using UVISEL Spectroscopic phase modulated Ellipsometer

The samples characterised in this study were DNA sensor layers mounted on a silicon wafer, with an oxide layer linking the sendor layer to the wafer. The index contrast between the linker and DNA sensor layers was very small, and very high sensitivity measurements were necessary to complete the characterization.

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Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm