QC of Semiconductors which Feature Thin and Narrow Patterns

The combination of microbeam and thickness measurement capability makes the XGT-9000 a useful tool for the QC of semiconductors, which feature thin and narrow patterns. Thickness sensitivity depends on elements traced, but can be at the Angstrom level.

Semiconductor pattern - XGT-9000

Sample: Semiconductor pattern

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X-ray Analytical Microscope