HORIBA, the world's leading manufacturer of Mass Flow Controllers (MFC's) for the semiconductor industry is proud to celebrate 13 years production of the SEC-Z500X family of Multi Range Multi Gas mass flow controllers suitable for ultra clean environments. Since 2004 HORIBA have manufactured more than 500,000 units of the SEC-Z500X Series class leading devices demonstrating HORIBA’s leadership in large volume quality production capability. The world’s most technologically advanced semiconductor manufacturers specify them because of the availability and HORIBA’s ability to meet their expectations of the highest levels of performance in terms of repeatability, reproducibility, accuracy and reliability.
‘The quality of HORIBA's SEC-Z500X product family is reflected by the ever increasing demand from users in process–critical operations that are not semiconductor related’ says Phil Burnside, HORIBA’s New Business Development Manager, he continues, ‘this milestone demonstrates HORIBA’s commitment and capability to consistently deliver high performance and high quality products to all market segments where precision fluid control is essential,’ adding that ‘customers around the world are benefiting from HORIBA’s experience in the semiconductor market, it’s R&D and HORIBA's global presence offering local product support wherever the product is used’. The RoHS compliant SEC-Z500X Series features an advanced variable PID algorithm for high speed response, high precision piezo electric control valves and metal seals. Gas type and flow rate can be programmed using the free of charge configuration software, saving the user time, space and money through a reduced MFC inventory.
For flow rates up to 500slm the multi range, multi gas SEC-Z500X offers failsafe normally open and normally closed versions meaning the flexibly mounted SEC-Z500X Series is the ideal MFC for applications in Vacuum Coating, Thin Films, Analytical and Pharmaceutical markets as well as enabling research and development institutes with a flexible, reliable and fully supported product range.
For more information on the SEC-Z500X Series range please visit our product page.