Launched Fiber Optic Type Hot Phosphoric Acid Concentration Monitor Contributing to Efficient Semiconductor Manufacturing Process

|   Press release

HORIBA Advanced Techno., Co., Ltd. launched the CS-620F, a fiber optic type hot phosphoric acid concentration monitor on June 27, 2020. The monitor keeps track of the concentration of phosphoric acids that are used in the semiconductor manufacturing process, mainly in the SiN layer*1 etching process for three-dimensional NAND flash memory. Previously, it was necessary to cool high-temperature phosphoric acids before measuring their concentration. Using PFA*2 in the sample measuring unit, however, the CS-620F measures the concentration of a chemical solution without the need to cool it; this renders the cooling mechanism and cooling time unnecessary, thus enhancing the efficiency of the semiconductor manufacturing process. The unit sales target is 300 by 2025.
*1 A thin film of a compound of silicon and nitrogen formed on a silicon wafer, etc.
*2 A kind of fluorine resin with superior heat and chemical resistance
 

Background

Demand for semiconductors for use at data centers and in the 5G infrastructure market is growing strongly. Semiconductors are becoming increasingly miniaturized and multi-layered for power saving and higher performance, with the result that the processing time and the amounts being processed at the semiconductor manufacturing process are on the increase. This makes it imperative in the market to increase the efficiency and yield of the semiconductor manufacturing process. In response to such growing needs, HORIBA Advanced Techno has come up with a new offering that improves the efficiency of concentration control of high-temperature, highly-concentrated phosphoric acids.


Features

  1. Cooling mechanism and cooling time rendered unnecessary, as the CS-620F measures high-temperature (140 to 170℃) phosphoric acid without cooling it
  2. Lower contamination risk thanks to the use of PFA in the sample connection unit
  3. Faster control made possible by real-time measurement (updating data every 3 seconds)
  4. The CS-620F only needs to be calibrated once every six months, thus significantly reducing instrument downtime.


Product overview

Name Fiber Optic Type Hot Phosphoric Acid Concentration Monitor CS-620F
Dimensions        

Sample cell                   240 x 209 x 205 mm (W x D x H)
Monitor                         200 x 308 x 78 mm (W x D x H)
Light source unit            200 x 262 x 100 mm (W x D x H)
(excludes protrusions)

Measurement theoryAbsorption spectroscopy
Chemical solution temperature140 to 170°C
Weight             Sample cell                   approx. 3.0 kg
Monitor                         approx. 3.6 kg
Light source unit            approx. 2.8 kg


For More Information

Products information:
https://www.horiba.com/en_en/products/detail/action/show/Product/cs-620f-2019/