Vacuum UV Spectroscopy

Over the past 35 years, HORIBA Scientific has developed some of the most innovative Vacuum Ultra Violet (VUV) monochromators for synchrotron centers and the wider scientific community.  By taking advantage of our leading position as designers of diffraction gratings, these monochromators combine the ultimate advanced diffraction grating technologies and ultra-precise mechanics under vacuum.  They have been installed in several synchrotron centers and have demonstrated consistently superior performance.  HORIBA Scientific has developed a wide offering of compact VUV monochromators for applications such as extreme UV lithography and soft x-ray photoemission spectroscopy. 

To learn more visit our Vacuum Ultra Violet Spectroscopy page.

Browse Products

Vacuum Spectrometer H30-UVL
MoreVacuum Spectrometer H30-UVL
Monograph for far and extreme ultraviolet
Vacuum Spectrometer H20-UVL
MoreVacuum Spectrometer H20-UVL
A Compact Monochromator for the 100-600 nm region
Vacuum Spectrometer - Custom Monochromators
MoreVacuum Spectrometer - Custom Monochromators
Vacuum monochromator to answer specific request
Vacuum Spectrometer - TGM300
MoreVacuum Spectrometer - TGM300
Monochromator with 300 mm focal length to cover the 10-300 nm spectral range
Vacuum Spectrometer - TGM1900
MoreVacuum Spectrometer - TGM1900
Monochromator with 1146 mm focal length to cover the 8-128 nm spectral range.
Vacuum Spectrometer - TGM1200
MoreVacuum Spectrometer - TGM1200
Monochromator with 1000 mm focal length to cover the 12.5-400 nm spectral range.
Vacuum Spectrometer - TGS300
MoreVacuum Spectrometer - TGS300
Toroidal Grating Spectrograph, coming from Synchrotron technologies
Vacuum System - VUV Transmission
MoreVacuum System - VUV Transmission
Use of H20UVL for VUV transmission
Vacuum System - VUV Fluorescence
MoreVacuum System - VUV Fluorescence
Fluorescence instrument based on H20-UVL and iHR320
Vacuum Spectrometer - VHR Series
MoreVacuum Spectrometer - VHR Series
Vacuum High Resolution monochromators for the 100-1500 nm region
Vacuum Spectrometer - PGM1000
MoreVacuum Spectrometer - PGM1000
Monograph to explore the 1- 125 nm
Vacuum Spectrometer - PGM200
MoreVacuum Spectrometer - PGM200
Plane Grating Monographs


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