Semiconductor

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

Related Products

Below you can see the different stages during the FPD production process. Please click on each phase in order to see the products that are avaialble to you during this stage.

SLIA-300
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Highly Sensitive Silica Monitor

GD-Profiler 2™
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Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

LabRAM HR Evolution
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Confocal Raman Microscope

XGT-7200
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X-ray Analytical Microscope

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CM-200A/210A
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Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CS-100 Series
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Stand-alone Type Chemical Concentration Monitor

CS-131
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High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-137
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BHF Concentration Monitor

CS-139E
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High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-150
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SPM Monitor

CS-153
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FPM Monitor

CS-153N
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HF/HNO3 Monitor

CS-600F
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Fiber Optic Type Chemical Concentration Monitor

CS-620F
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Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
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High Precision, High Stability Chemical Concentration Monitor

CS-900
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Non-Contact Chemical Concentration Monitor

HE-480C-GC
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Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R(W)
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Industrial resistivity meter

HE-960CA
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Citric Acid Monitor

HE-960H-TM
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Wide range TMAH Concentration Monitor

HE-960H-TM-S
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High Precision TMAH Concentration Monitor

HE-960HC
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Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
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Carbon Sensor Conductivity Meter

HE-960R-GC(W)
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Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
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2-Channel Resistivity Meter

HE-960TM
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TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

HF HD-960L
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Dissolved Oxygen Monitor in Low Concentration

HF-960EM
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In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
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HF / HCl Concentration Monitor

HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
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2-channel High Precision HF Concentration Monitor

HP-480(W)
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Industrial pH meter

HZ-960
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Dissolved Ozone Monitor

SC-2 Concentration Monitor, CS-152
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Semiconductor process monitoring for SC-2 process

SLIA-300
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Highly Sensitive Silica Monitor

UP-100
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Micro Volume pH Monitor

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CRITERION D500
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Pressure Insensitive Mass Flow Module

EC-5000 Series
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Exhaust Pressure Controller

FS-3000
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Thermal Flow Splitter

GR-300 Series
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Wafer Back Side Cooling System

LE Series
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Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
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Digital Liquid Mass Flow Meters / Controllers

MI-1000/MV-1000
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Mixed Injection System Liquid Vaporizers

MV-2000 Series
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Mixed Injection System Liquid Vaporizer

PV Series
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Piezo Actuator Valve

SEC-400 Series
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Mass Flow Controller

SEC-8000 F/D/E Series
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High Temperature Digital Mass Flow Controller

SEC-E Series
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Mass Flow Controller

SEC-N100 Series
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Digital Mass Flow Controller

SEC-Z500X
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Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
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Pressure Insensitive Mass Flow Controller

UR-Z700 Series
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Digital Automatic Pressure Regulator

VC Series
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Direct Liquid Injection System

XF-100 Series
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Digital Liquid Mass Flow Meters

IR-400
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High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

IR-300
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Vapor Concentration Monitor

MICROPOLE System
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Compact Process Gas Monitor

EV-140C
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Optical Emission Spectroscopy Etching End-point Monitor

1000M Series
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Long Focal Length Spectrometer

MP Process

Partica LA-960
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Laser Scattering Particle Size Distribution Analyzer