Semiconductor

Wet Process Control

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.


Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

Browse Products

Hydrofluoric Acid Monitor CM-200A/210A
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Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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Stand-alone Type Chemical Concentration Monitor

CS-100F4
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Multi-point Chemical Solution Monitor

SC-1 Monitor, CS-131
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High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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BHF Concentration Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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SPM Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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FPM Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
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HF/HNO3 Monitor

Fiber Optic Type Chemical Concentration Monitor CS-600F
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Fiber Optic Type Chemical Concentration Monitor

High Precision, High Stability Chemical Concentration Monitor CS-700
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High Precision, High Stability Chemical Concentration Monitor

Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
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Carbon Sensor Conductivity Meter (Low concentration type)

Industrial resistivity meter HE-480R(W)
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Industrial resistivity meter

Citric Acid Monitor HE-960CA
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Citric Acid Monitor

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
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Wide range TMAH Concentration Monitor

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S
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High Precision TMAH Concentration Monitor

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
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Carbon Sensor Conductivity Meter (High concentration type)

Carbon Sensor Conductivity Meter HE-960HC(High concentration type),HE-960LC
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Carbon Sensor Conductivity Meter

Carbon Sensor Resistivity Meter HE-960R-GC(W)
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Carbon Sensor Resistivity Meter

2-Channel Resistivity Meter HE-960RW-GC(W)
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2-Channel Resistivity Meter

TMAH Conductivity Meter HE-960TM
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TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

High Resistivity Meter HE-Z-100T
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High Resistivity Meter

Dissolved Oxygen Monitor in Low Concentration HF HD-960L
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Dissolved Oxygen Monitor in Low Concentration

In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
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In-line Sensor & Auto Range Switching Concentration Monitor

HF / HCl Concentration Monitor HF-960H
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HF / HCl Concentration Monitor

Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

2-channel High Precision HF Concentration Monitor HF-SP-CU
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2-channel High Precision HF Concentration Monitor

Industrial pH meter HP-480(W)
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Industrial pH meter

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M
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Dissolved Ozone Monitor

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E
More SC-2 Concentration Monitor, CS-152

Semiconductor process monitoring for SC-2 process

Highly Sensitive Silica Monitor SLIA-300
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Highly Sensitive Silica Monitor

Micro Volume pH Monitor UP-100
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Micro Volume pH Monitor

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