Semiconductor

Wet Process Control

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. Products include; chemical concentration monitors for measuring the concentration of various chemicals, in-line pH monitors which are used throughout various industries including pharmaceutical and food and beverage manufacturing and ultra-pure water monitors when ultra-pure water is integral to the manufacturing process. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.


Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

Browse Products

More2-channel High Precision HF Concentration Monitor HF-SP-CU
2-Channel Resistivity Meter HE-960RW-GC(W)
More2-Channel Resistivity Meter HE-960RW-GC(W)
BHF Concentration Monitor, CS-137
MoreBHF Concentration Monitor, CS-137
Carbon Sensor Conductivity Meter (High concentration type) HE-960HC
MoreCarbon Sensor Conductivity Meter (High concentration type) HE-960HC
Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
MoreCarbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
Carbon Sensor Resistivity Meter HE-960R-GC(W)
MoreCarbon Sensor Resistivity Meter HE-960R-GC(W)
MoreCS-600F
Fiber Optic Type Chemical Concentration Monitor
Dissolved Oxygen Monitor in Low Concentration HF HD-960L
MoreDissolved Oxygen Monitor in Low Concentration HF HD-960L
Dissolved Ozone Monitor HZ-960
MoreDissolved Ozone Monitor HZ-960
FPM Monitor, CS-153
MoreFPM Monitor, CS-153
H2O2 Monitor HZ-960HPO-M
MoreH2O2 Monitor HZ-960HPO-M
Industrial resistivity meter HE-480R(W)
MoreHE-480R(W)
Industrial resistivity meter
Citric Acid Monitor HE-960CA
MoreHE-960CA
Citric Acid Monitor
Carbon Sensor Conductivity Meter HE-960LC
MoreHE-960LC
Carbon Sensor Conductivity Meter
HF / HCl Concentration Monitor HF-960H
MoreHF-960H
HF / HCl Concentration Monitor
HF/HNO3 Monitor, CS-153N
MoreHF/HNO3 Monitor, CS-153N
High Precision TMAH Concentration Monitor HE-960H-TM-S
MoreHigh Precision TMAH Concentration Monitor HE-960H-TM-S
High Precision, High Stability Chemical Concentration Monitor
MoreHigh Precision, High Stability Chemical Concentration Monitor
High Resistivity Meter HE-Z-100T
MoreHigh Resistivity Meter HE-Z-100T
Highly Sensitive Silica Monitor SLIA-300
MoreHighly Sensitive Silica Monitor SLIA-300
Hydrofluoric Acid Monitor CM-200A/210A
MoreHydrofluoric Acid Monitor CM-200A/210A
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing
In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
MoreIn-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
Industrial pH meter HP-480(W)
MoreIndustrial pH meter HP-480(W)
KOH Monitor HE-960H-KOH
MoreKOH Monitor HE-960H-KOH
Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
MoreLow Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M
Micro Volume pH Monitor UP-100
MoreMicro Volume pH Monitor UP-100
Multi-point Chemical Solution Monitor CS-100F4
MoreMulti-point Chemical Solution Monitor CS-100F4
SC-1 Monitor, CS-131
MoreSC-1 Monitor, CS-131
High-speed response and compact chemical solution concentration monitor
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
SPM Monitor, CS-150
MoreSPM Monitor CS-150
Stand-alone Type Chemical Concentration Monitor CS-100 Series
MoreStand-alone Type Chemical Concentration Monitor CS-100 Series
TMAH Conductivity Meter HE-960TM
MoreTMAH Conductivity Meter HE-960TM
Perfect for Controlling TMAH Developer Concentrations
TMAH/H2O2 Monitor, CS-139E
MoreTMAH/H2O2 Monitor, CS-139E
High-speed response and compact chemical solution concentration monitor
Wide range TMAH Concentration Monitor HE-960H-TM
MoreWide range TMAH Concentration Monitor HE-960H-TM

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