Semiconductor

Wet Process Control

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.


Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

Browse Products

CM-200A/210A
MoreCM-200A/210A
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor
CS-100 Series
MoreCS-100 Series
Stand-alone Type Chemical Concentration Monitor
CS-100F4
MoreCS-100F4
Multi-point Chemical Solution Monitor
CS-131
MoreCS-131
High-speed response and compact chemical solution concentration monitor SC-1 Monitor,
CS-137
MoreCS-137
BHF Concentration Monitor
CS-139E
MoreCS-139E
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor,
CS-150
MoreCS-150
SPM Monitor
CS-153
MoreCS-153
FPM Monitor
CS-153N
MoreCS-153N
HF/HNO3 Monitor
CS-600F
MoreCS-600F
Fiber Optic Type Chemical Concentration Monitor
CS-700
MoreCS-700
High Precision, High Stability Chemical Concentration Monitor
HE-480C-GC
MoreHE-480C-GC
Carbon Sensor Conductivity Meter (Low concentration type)
HE-480R(W)
MoreHE-480R(W)
Industrial resistivity meter
HE-960CA
MoreHE-960CA
Citric Acid Monitor
HE-960H-KOH
MoreHE-960H-KOH
KOH Monitor
HE-960H-TM
MoreHE-960H-TM
Wide range TMAH Concentration Monitor
HE-960H-TM-S
MoreHE-960H-TM-S
High Precision TMAH Concentration Monitor
HE-960HC
MoreHE-960HC
Carbon Sensor Conductivity Meter (High concentration type)
HE-960LC
MoreHE-960LC
Carbon Sensor Conductivity Meter
HE-960R-GC(W)
MoreHE-960R-GC(W)
Carbon Sensor Resistivity Meter
HE-960RW-GC(W)
MoreHE-960RW-GC(W)
2-Channel Resistivity Meter
HE-960TM
MoreHE-960TM
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
HE-Z-100T
MoreHE-Z-100T
High Resistivity Meter
HF HD-960L
MoreHF HD-960L
Dissolved Oxygen Monitor in Low Concentration
HF-960EM
MoreHF-960EM
In-line Sensor & Auto Range Switching Concentration Monitor
HF-960H
MoreHF-960H
HF / HCl Concentration Monitor
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF-SP-CU
MoreHF-SP-CU
2-channel High Precision HF Concentration Monitor
HP-480(W)
MoreHP-480(W)
Industrial pH meter
HZ-960
MoreHZ-960
Dissolved Ozone Monitor
HZ-960HPO-M
MoreHZ-960HPO-M
H2O2 Monitor
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
SLIA-300
MoreSLIA-300
Highly Sensitive Silica Monitor
UP-100
MoreUP-100
Micro Volume pH Monitor

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