Semiconductor

Wet Process Control

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.


Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

Browse Products

CM-200A/210A
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Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor

CS-100 Series
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Stand-alone Type Chemical Concentration Monitor

CS-100F4
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Multi-point Chemical Solution Monitor

CS-131
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High-speed response and compact chemical solution concentration monitor SC-1 Monitor,

CS-137
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BHF Concentration Monitor

CS-139E
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High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor

CS-150
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SPM Monitor

CS-153
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FPM Monitor

CS-153N
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HF/HNO3 Monitor

CS-600F
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Fiber Optic Type Chemical Concentration Monitor

CS-700
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High Precision, High Stability Chemical Concentration Monitor

HE-480C-GC
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Carbon Sensor Conductivity Meter (Low concentration type)

HE-480R(W)
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Industrial resistivity meter

HE-960CA
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Citric Acid Monitor

HE-960H-TM
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Wide range TMAH Concentration Monitor

HE-960H-TM-S
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High Precision TMAH Concentration Monitor

HE-960HC
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Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
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Carbon Sensor Conductivity Meter

HE-960R-GC(W)
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Carbon Sensor Resistivity Meter

HE-960RW-GC(W)
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2-Channel Resistivity Meter

HE-960TM
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TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations

HE-Z-100T
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High Resistivity Meter

HF HD-960L
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Dissolved Oxygen Monitor in Low Concentration

HF-960EM
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In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
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HF / HCl Concentration Monitor

HF-960M
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Low Concentration Type HF/HCl/NH3 Concentration Monitor

HF-SP-CU
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2-channel High Precision HF Concentration Monitor

HP-480(W)
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Industrial pH meter

HZ-960
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Dissolved Ozone Monitor

SC-2 Concentration Monitor, CS-152
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Semiconductor process monitoring for SC-2 process

Highly Sensitive Silica Monitor SLIA-300
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Highly Sensitive Silica Monitor

UP-100
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Micro Volume pH Monitor

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