OES-Star

UV-VIS-NIR Spectrometer

Horiba’s OEM division, a major supplier of OES solutions, has developed a high end OES Spectrometer with a proprietary optical configuration for broad coverage (185-1050 nm) and high resolution. The OES-Star is available with a selection of three UV-VIS-NIR Back-Illuminated (B.I.) sensors, one TE-Cooled and two uncooled CCD detectors. This unique OES system features an optical design that provides a high peak symmetry across a very broad spectral range combined with high spectral resolution better than 1 nm, at an unmatched aperture of F/2.3.

For OEM Industrial Applications

Optical Emission Spectrometry
Reflectometry
Process and Quality Control
Examples:
- Semiconductor
- Plasma Monitoring
- Wafer Inspection
- Recycling

*Available in select countries.

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

Segment: Scientific

Division: OEM

Manufacturing Company: HORIBA Scientific

Optical emission spectrometry (OES)
Unmatched long term stability and excellent wavelength accuracy
USB2 Ethernet and EtherCAT interface
High spectral resolution combined with high throughput
Broad wavelength coverage from UV to NIR
Multiple B.I. CCD options cooled/uncooled with high dynamic range
CMOS sensor option with electronic shutter and ultra high spectral rate

Flat resolution and dispersion across the entire spectral range (185 -1050 nm) combined with excellent peak symmetry

This OES-Star is featuring a tall CCD with built in round-to-line (RTL) fiber converter to maximize light collection and therefore the system throughput.
Input fiber with a core of 600 to 800 µm or smaller can be used. However to take advantage of the tall detector and RTL, larger core fibers are recommended.

Built-in round-to-line (RTL) converter boosts throughput when combined with a large core diameter fiber and our tall CCD (S13241-1108S)

Quantum Efficiency Plot

OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

General Spectrometer Specifications*
Spectral Coverage	185 – 1050 nm (2048 horizontal pixel format with14 µm pixel size)
Spectrometer Input	SMA (standard), other input types available upon request
Spectral Resolution	<1 nm with 22 µm slit with very high symmetry across broad spectral range (flexible based on customer’s need)
Average Spectral Dispersion	34.6 nm/mm; 0.484 nm/pixel (14 µm pixel size)
Focal Length	116 mm
F/#	F/2.3
Wavelength Accuracy	< +/- 0.1 nm
Stray Light	< 0.1%*
Software	LabVIEW™ acquisition software for initial evaluation (DLLs provided for software integration)

CCD Detector Model	Cooled BI High-end CCD with best dynamic range (S13241-1108S)	BI CCD Middle Grade (S14660-2048N)	BI CCD cost effective (S11071-1106N)
CCD Sensor Format	2048 x 256	2048 x 192	2048 x 70
CCD Pixel Size	12 x 12 μm	14 x 14 μm	14 x 14 μm
Image Size	24.5 x 3.0 mm	28.6 x 2.68 mm	28.7 x 1.0 mm
CCD QE at 20°C	90% or higher at the peak	High sensitivity over a wide spectral range	> 75% for 450 - 750 nm
Deep Thermoelectric Cooling	-5º C	Non-cooled	Non-cooled
Full Well Capacity	500,000 e¯/pixel (typical)	200,000 e¯/pixel (typical)	>200,000 e¯/pixel (typical) >175,000 e¯/pixel (minimum)
Readout Noise	50 e¯ (typical) (@ 1.5MHz sampling)	40 e¯ (typical) 50 e¯ (maximum)	35 e¯ (typical) 45 e¯ (maximum)
Digitization	16-bit ADC	16-bit ADC	16-bit ADC
Dynamic range (FW/RN)	10000:1	5000:1	5700:1
Non-linearity (measured on each system)	<1.8% (maximum) at low gain <0.9% (maximum) at high gain	<0.1% (corrected)	<0.1% (corrected)
Dark Current	1.5 e-/pixel/s (typical) (@-5° C)	50 e¯/pixel/s (typical) (@ 20° C)	50 e¯/pixel/s (typical) 500 e¯/pixel/s (maximum)
Environmental Conditions	Operating temperature 0° C to 40° C ambient Relative humidity <70% (non-condensing) Storage temperature -20° C to 50° C
Power Requirements AC/DC Power Supply (provided)	90-264 VAC, 47–63 Hz