Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC

Compact conductivity meter for measurement of low concentration which have glass carbon sensor. A glass carbon sensor is not contaminated by metal elution and is chemically resistant.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide range compatibility: 0 - 9999 μS/cm
  • Chemical resistant carbon sensor
  • Compact size

 

 

Sensor

ESH-01-L-GC5

(Cell constant : 0.1/cm)

ESH-1-L-GC9

(Cell constant : 1/cm)

 
Conductivity0.00 to 20.00 µS/cm0.0 to 200.0 µS/cm0.0 to 200.0 µS/cm0 to 2000 µS/cm*1
 20.00 to 70.00 µS/cm200.0 to 999.9 µS/cm200.0 to 700.0µS/cm2000 to 9999 µS/cm*2
Repeatability

*1 Within +/- 0.5% of the full scale

*2 Within +/- 1.0% of the full scale

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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