Citric Acid Monitor HE-960CA

Citric Acid Monitor HE-960CA

High precision, wide-range citric acid monitor having chemical resistance sensor. Measurement range : 0 - 2%.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide range measurement
        Concentration: 0 - 2%, Conductivity: 0 - 10 mS/cm
  • High precision
  • PFA Sensor

 

 

Model nameHE-960CA
Target of measurementCitric acid
Measurement rangeConcentration: 0 -2%, Conductivity: 0 - 10mS/cm
Repeatability

2000 ppm range: within +/- 1%R.D. or +/- 5 ppm whichever greater

2.000% range: within +/- 1%R.D. or +/- 0.005% whichever greater

Linearity+/- 0.5% of F.S. (in equivalent input)
Transmission outputNumber of output: 3
Contact outputOutputs: 5 points
Communication outputRS-485
Power supply

24V DC +/- 10% 10W

Compatible sensorFS-07F Series
Wetted material of sensorGC, PFA, Karletz

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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