Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor
The CM-200A/210A hydrofluoric acid monitors have been developed specifically to meet the stringent demands of semiconductor manufacturing. The CM-200A/210A provides a real time read-out of hydrofluoric acid concentration by measuring the electric conductivity of the sample solution. These superior units offer high repeatability even at low concentrations. The CM-200A/210A can be used for a variety of purposes ranging from monitoring etched wafer cleaning processes to any other industrial application of hydrofluoric acid.
Hydrofluoric acid concentration monitor
CM-200A: Dip type sensor
Principle of measurement
Conductivity measuring method by electromagnetic induction
Any single range of the ranges below
Within +/-2% of full scale
Within +/-2% of full scale/day
90% response: within 5 seconds
Serial communication: RS-232C
AC power model: 100V to 230V AC+/-10%, 50Hz/60Hz, 8VA
Condition of sample water
Temperature: 10℃ to 40℃(Standard temperature 25℃)
Temperature: 5℃ to 35℃
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