- Real-time display
The unit determines hydrofluoric acid concentration by measuring the electric conductivity of the solution. The concentration is then determined by comparison to the values on the calibration curve.
- High accuracy even at the low concentrations used for semiconductor manufacturing
The CM-200A/210A feature a 0-1/2/5/10/20/50 mass% range, which allows the units to be employed for virtually any process used in semiconductor manufacturing. Even in the 0-1 mass% range, the units boast a repeatability of +/-2% F.S. This means that the CM-200A/210A is effective even for controlling low concentration ghydrofluoric acid baths such as those used in the latest memory production lines.
- Sensor designed for stable measurement
The CM-200A/210A feature sensors molded entirely of PFA resin. This eliminated the danger of the solution affecting metal parts, or of metal ions or other impurities leaking into the sample solution.
- Upper/lower limit alarm
If the hydrofluoric concentration of the solution is outside the specified range, a feedback signal is generated. The system indicates if the feedback occurred due to the concentration crossing the lowest(L-low), lower(Low), upper(High), or highest(H-high) limit. This advanced system helps prevent the production of bad lots due to mistaken injection of hydrofluoric solution.
- Appropriate for a variety of uses
The CM-200A/210A are equipped with DIN size conversion units. These small, lightweight units are perfect for use with hydrofluoric acid dilution units, hidrofluoric acid supply units, and wafer cleaning equipment. The CM-200A's sensor is placed directly into the solution. The CM-210A's sensor is designed for placement in the piping of the circulation loop. Simply choose the appropriate model for the desired use.