- Compact design
- Low maintenance and operating costs
- Effective function for countering erroneous detection.
The PR-PD3 Particle Detection System offers excellent throughput, a dependable optical system, and functions that reduce false detections. These features are packaged together in a compact system that is designed to minimize running costs. The PR-PD3 is capable of great versatility thanks to its 0.5 μm detection sensitivity.
Particles on reticle/mask with or without pellicle
Laser scattering method
Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection
* High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available.
Detectable particle size
Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)
5, 6 or 7 inch (Please specify when ordering.)
Reticle cassette (Please specify when ordering)
Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.)
Data mapping display on the FPD
Approx. 900 (W) x 1350 (D) x 1590 (H) mm
Clean room or clean booth, class 100 or better
100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase
Pressure difference 8.0 x 104 Pa or more, 50 L/min
Do you have any questions or requests? Use this form to contact our specialists.