Deuterium Lamp for VUV systems

For radiation down to 115nm

The DLS200 is a 200W Deuterium lamp equipped with a MgF2 window to allow vacuum UV radiation down to 115 nm. This lamp is coupled with a mirror chamber to focus the beam on the entrance slit of a monochromator.

 

 

Segment: Scientific
Manufacturing Company: HORIBA France SAS

Applications:

  • Fluorescence excitation
  • Transmission/Absorption spectroscopy
  • Monochromatic Semiconductor exposure
  • Lithography
  • Photo-chemical processes with high photon energy

Emission range

115 – 350 nm

Power

200 W

Window material

MgF2

Vacuum flange

DN50KF

Cooling

Water cooled

Arc diameter

1 mm

Operating emission angle

14°

Noise

Better than 0.1% @ 215 nm

Drift

Better than 0.5% @ 250 nm

Ignition voltage

500 V

Life time of the bulb

300 hours at 1.8 A

Heating up time

30 s

Overall length

255 mm

Weight

0.9 kg

Power supply

Included in the package

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