Digital Liquid Mass Flow Meters XF-100 Series

Digital Liquid Mass Flow Meters XF-100 Series Image

The digital liquid mass flow meter XF series uses the differential-pressure measurement method to achieve a high-speed response of 100 msec (or less than 0.8 sec when it is used in combination with a piezo valve).

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • High speed response by using differential pressure measurement method
    100 msec (or less than 0.8 sec when it is used in combination with a piezo valve)
  • High Accuracy : +/- 0.8% F.S.
  • Ultra clean.
Liquid Source Vaporization and Supply for Deposition and Etching in Semiconductor Manufacturing Process
Liquid Source Vaporization and Supply for Deposition and Etching in Semiconductor Manufacturing Process

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