Digital Mass Flow Controller SEC-N100 Series

Digital Mass Flow Controller SEC-N100 Series

The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its' cost reduction capabilities in your process.

*1 Excluding SEC-N17X Series.

View our MFC comparison chart here.

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM
  • Wide variety of communications and power supply
  • High S.P. accuracy:  +/- 1.0% S.P. (*1)
  • 1 second high speed responce (*1)
  • Multi-gas, multi-range solution
 
The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.

        

 

ModelsSelect communication modeSelect power supply
SEC-N102 series

Digital communication

▶RS485 F-NET Protocol

Analog communication

▶0〜5VDC

±15VDC(±5%)

HORIBA'S lineup includes leased power supply PE series.

SEC-N104 seriesDeviceNet™ communicationConforming to ODVA standards
SEC-N105 series

CC-Link® communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to  CC-Link® standards 24VDC (13 to 32VDC)
SEC-N106 series

PROFIBUS™ communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to PROFIBUS™ standards 24VDC(13 to 32VDC)
SEC-N107

EtherCAT® communication

Conforming to EtherCAT®  standards 24VDC

*1 Excluding SEC-N17X Series

External Dimension

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Plasma Emission Control and Process Gas Monitoring for Dry Coating Process in Functional Glass Manufacturing
Plasma Emission Control and Process Gas Monitoring for Dry Coating Process in Functional Glass Manufacturing
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Product Accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
MoreDedicated power sources PE Series
Display unit DU series
MoreDisplay unit DU series
Mass Flow Checker MFT-20
MoreMass Flow Checker MFT-20
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
Settings units SU-503ED/502EA
MoreSU-503ED/502EA