SEC-N100 Series

Digital Mass Flow Controller SEC-N100 Series

Digital Mass Flow Controller

The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its' cost reduction capabilities in your process.

*1 Excluding SEC-N17X Series.

View our MFC comparison chart here.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM
  • Wide variety of communications and power supply
  • High S.P. accuracy:  +/- 1.0% S.P. (*1)
  • 1 second high speed responce (*1)
  • Multi-gas, multi-range solution
 
The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.

        

 

ModelsSelect communication modeSelect power supply
SEC-N102 series

Digital communication

▶RS485 F-NET Protocol

Analog communication

▶0〜5VDC

±15VDC(±5%)

HORIBA'S lineup includes leased power supply PE series.

SEC-N104 seriesDeviceNet™ communicationConforming to ODVA standards
SEC-N105 series

CC-Link® communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to  CC-Link® standards 24VDC (13 to 32VDC)
SEC-N106 series

PROFIBUS™ communication

Analog communication

▶0 to 5VDC, 0 to 10VDC 4 to 20mA

Conforming to PROFIBUS™ standards 24VDC(13 to 32VDC)
SEC-N107

EtherCAT® communication

Conforming to EtherCAT®  standards 24VDC

*1 Excluding SEC-N17X Series

SEC-N100 Specification Sheet

External Dimension

For further specifications of the SEC-N100 Series please click here.

 

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Plasma Emission Control and Process Gas Monitoring for Dry Coating Process in Functional Glass Manufacturing
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Gas Mass Flow Control and Measurement in Research and Testing Laboratories

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