SEC-R100 Series

Digital Mass Flow Controller SEC-R100 Series

Digital Mass Flow Controller

The digital mass flow controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage, analytical, etc.

With this mass flow controller high accuracy (+/-1.0% S.P.) and performance are achieved without the high cost plus the multi gas/multi range function can be used for the nine most popular gases.

Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • Multi Gas / Multi Range*
    • User can change gas type and full scale range with free software
    • Reduce stock
    • Increased flexibility
  • High Accuracy ±1.0% S.P.
  • ≦1 second response across the full flow rate range
  • High performance Solenoid Valve
  • O-ring material - Viton™
  • Fittings - ¼” Swagelok equivalent
  • Digital / Analog communication
    • Profibus DP-V0
    • Analog 0-5, 0-10 VDC,4-20mA
  • 24 V DC power supply
  • RoHS compliant

*Gas selection from nine gases

 

Model NameSEC-R116SEC-R126

Full-scale flow rate
(N2 conversion flow rate)

< 10LM

< 50LM
Compatible gasN2, O2, Air, H2, He, CH4, C3H8, Ar, CO2
Flow rate control range2-100%F.S.
Accuracy±1.0%S.P (Flow rate >30%F.S.)± 0.3%F.S. (Flow rate ≦ 30%F.S.)
Operation temperature5 to 50 (recommended temperature range: 15 to 45℃)
Response≦ 1second over full flow rate range
Valve typeNormally Closed
Linearitywithin +/- 0.5% of F.S.
Repeatabilitywithin +/- 0.2% of F.S.
Power24VDC (13 to 32VDC)7.5VA
DigitalProfibus DP-V0
Analog0-5(10)VDC, 4-20mA
Standard fitting1/4” Swagelok equivalent
Leak integrity≦1×10-10Pa・m3/s
MAX. Operating pressure450kPa (G)
Operating differential pressure50 to 300kPa (d)>3LM:100 to 300kPa (d)200 to 300kPa (d)
Wetted materialsSUS316L, PTFE, Elastomer, Magnetic Stainless steel and Fluoro Rubber

The precision is that associated with the full-scale MR and MG number values.
The flow rate precision guaranteed temperatures confirm to Semiconductor standard.
For details, please contact us.

 

Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing

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