Direct Liquid Injection System VC Series

Direct Liquid Injection System VC Series

The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.

HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:

  • A liquid mass flow meter for flow rate measurement,
  • A high temperature mass flow controller for measurement of vapor flow rate,
  • Valves, filters, heaters, etc.
Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Compact size
  • Can be installed in a variety of positions
  • Best-selling TEOS vaporization system models
  • Combines SEF or LF, and digital control is possible
  • No need for a special bubbling tank or vaporization tank
  • Line-up of DeviceNetTM model
  • RoHS Compliance.

 

Model

VC-1420

 

Flow rate generated*1 (During TEOS generation)

Max. 5.0 CCM conversion (liquid phase conversion)

 

Liquids supported

 TEOS, P(OCH3)3, C6F6

Temperature rise

 Max. 150°C

Pressure generated*1

 Reduced pressure

External leak integrity

 1.0x10-8Pa·m3/s

Internal Leak Integrity

 1.0x10-6Pa·m3/s

Wetted mateliar

316L Stainless Steel ( polished surface )

Internal heater volume

 AC 100V to 120V 70W(35Wx2)

Temperature sensor used

Thermocouple K type (CA)

Pressure Resistance

 1.0MPa(G)

 Standard Fitting

 Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female

 

*1 Varies depending on the type of liquid.

 

*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).

 External Dimension

External Dimension of Direct Liquid Injection System VC Series

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