Dissolved Ozone Monitor HZ-960

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M

High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • High precision. Repeatability: F.S. +/- 0.2%
  • Wide range measurement
         0 - 10 mg/L (ZH-10 Sensor)
         0 - 40 mg/L (ZH-40 Sensor)
         0 - 100 mg/L (ZH-100 Sensor)
         0 - 500 mg/L (ZH-500 Sensor)
  • Remote calibration
  • RoHS compliant

 

 

Corresponding detectorZH-10ZH-40ZH-100ZH-500
Measurement range0 - 10.00mg/L0 - 40.00mg/L0 - 100mg/L0 - 500mg/L
Supply temperature                   5 - 30 deg.C5 - 80 deg.C
Chemical contact material of detectorPFA, PTFE, quartz glass
Supply pressureWithin 0.5 MPa
Repeatability+/- 0.2% of full scale
Linearity+/- 1.0% of full scale
Transmission outputNumber of output: 2
Contact outputNumber of output: 5
Contact inputNumber of input: 2
Communication outputRS-485
Power supplyRated voltage 24 +/- 10% V DC, 15W

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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