POCl3 Auto Refill System
HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3 in 20 litre ETFE lined stainless steel canisters to multiple fixed plastic bubbler vessels.
The FDM and VM series are used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell.
The system can also be used in the BBr3 diffusion process, improving process stability, increasing uptime, reducing logistics and labour costs and higher safety.
|POCl3, BBr3. Liquids compatible with pfa and ptfe|
|Process lines||4 x independent Coaxial, N2 purged process lines to deliver liquid to 4 x furnaces|
|Liquid line connections||All liquid line connections are housed inside cabinets that are connected to facility exhaust|
|Delivery distance limit||Total length of supply/return line 50m|
|Differential pressure sensor with alarm||Check for cabinet or Coaxial tubing leaks|
|Leak detection||Integrated liquid and gas leak detection|
|Over pressure protection||Safety burst disk|
|Supply method||Pressurise bulk canister|
|Bulk canister||Maximum 38 L (see diagram for dimensions)|
|Receiving system||Maximum 20 HORIBA VM Advanced Bubblers|
|Wetted parts||PFA and PTFE|
|Pressure Measurement points|
1. Operation line 1 MPa(G) F.S.
2. Purge line 500 kPa(G) F.S.
3. Bulk canister and pressurised leak check of wetted parts 300 kPa(G) F.S.4. Vacuum leak test and purge check function 100 kPa(A) F.S.
|Liquid removal method||Automatic N2 and vacuum cycle purge with automatic purge check function|
|Communications||EtherNET communication between refill system and HORIBA Advanced Bubbler VM|
|Bulk canister scale||0 to 100 kg (gross)|
|Noise||<60 dB (A) at 1 m|
|Working environment||15˚C to 35˚C ≤ 85% relative humidity|
|Height (including light tower)||2635 mm|
|Safety standards||CE, designed to SEMI S2|
|Power requirements||100~240 VAC 50/60 Hz 6 A ~ 12 A|
*subject to change
Automatic Refill System (FDM 1100) Features:
Bubbler (VM) Features:
Liquid temperature is measured in the VM. The flow algorithm calculates the required carrier gas flow through the bubbler based on the measurement of temperature, pressure and vapor pressure.
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