FS-3000

Thermal Flow Splitter

FS-3000 combines HORIBA STEC’s mass flow controller (MFC) and MuCube (Master controller). By controlling MFC from MuCube equipped with the HORIBA STEC’s proprietary control algorithm, FS-3000 achieves stable splitting control.

Segment: Semiconductor
Division: Fluid Control

The control algorithm realizes stable flow rate splitting control by controlling flow rate ratios, while controlling the pressure of the upper stream of FS-3000 using HORIBA STEC’s original control optimization technology. Furthermore, even when the splitting ratios are altered, the control algorithm realizes high-speed response to flow rate splitting.

  • Improve Expandability, Maintenance Performance FS-3000 supports splitting up to 15 flow channels through high-speed signal processing. When MFC fails, FS-3000 can be repaired simply by replacing failed slave only.
  • Flexible Response to Required Specifications FS-3000 supports a wide range of gases, including mixed gases. In addition, FS-3000 supports RS-485, DeviceNet as user interfaces.
Channels2-15 ChannelsOperating temperature5-50°C (recommended range: 15-45°C)
Introducing flow rateDepends on channels and introducing flow rateProof pressure1000 kpa (G)
Ratio setting rangeDepends on channels and introducing flow rateMounting orientationFree
Supply pressure conditionDepends on channels and introducing flow rateControl interfaceRS-485, DeviceNetTM
Valve typeO: Normally open C: Normally closePower supplyMaster, Slave DC24V
(Conforming to ODVA standards)
Response *Depends on channels and introducing flow rate  

*The response time of each channel is calculated with the response time being the time when the flow rate output of this product reaches 98% of the flow rate setting change amount. The slowest response time is the response time of the flow splitter.

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