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Brochures-Analyzers for Wet Process
HE-960H-TM
Wide range TMAH Concentration Monitor
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Wide measurement range : 0 - 10 %. Have the chemical resistant carbon sensor.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Wide range measurement
Concentration: 0 - 10%, Conductivity: 0 - 1000 mS/cm - Automatic display range switching
- Enables three types of measurement: TMAH concentration, conductivity, and temperature
- Chemical resistant carbon sensor
- 24 V DC power supply
- RoHS compliant
Indication Converter
| Model | HE-960H-TM |
|---|---|
| Measurement range | 0 - 10% |
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 series (flow-type carbon sensor) |
Schematics
