High Precision TMAH Concentration Monitor
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Repeatability: within +/- 0.003%. Measurement range : 0 - 3 %. Have the chemical resistant carbon sensor.
|Target of measurement||TMAH|
|Measurement range||Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm|
|Repeatability||Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)|
|Linearity||Within +/- 0.003wt% (Using equivalent input for conductivity)|
|Transmission output||Number of output: 4|
|Contact output||Outputs: 5 points|
|Power supply||24V DC +/- 10% 10W|
|Compatible sensor||FES-510 Series|
|Wetted material of sensor||GC, PFA, Karletz®|
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