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Brochures-Analyzers for Wet Process
HE-960H-TM-S
High Precision TMAH Concentration Monitor
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Repeatability: within +/- 0.003%. Measurement range : 0 - 3 %. Have the chemical resistant carbon sensor.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- High precision. Repeatability: within +/- 0.003%.
- Wide range measurement
Concentration: 0 - 3%, Conductivity: 0 - 1000 mS/cm - Automatic display range switching
- Enables three types of measurement: TMAH concentration, conductivity, and temperature
- Chemical resistant carbon sensor
- 24 V DC power supply
- RoHS compliant
| Model name | HE-960H-TM-S |
|---|---|
| Target of measurement | TMAH |
| Measurement range | Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm |
| Repeatability | Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
| Linearity | Within +/- 0.003wt% (Using equivalent input for conductivity) |
| Transmission output | Number of output: 4 |
| Contact output | Outputs: 5 points |
| Communication output | RS-485 |
| Power supply | 24V DC +/- 10% 10W |
| Compatible sensor | FES-510 Series |
| Wetted material of sensor | GC, PFA, Karletz® |
Schematics
