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Brochures-Analyzers for Wet Process
HE-960LC
Carbon Sensor Conductivity Meter
Can measures conductivity of low concentration. Its dual calculation circuits and software, combined with carbon sensors, enable measurements ranging without switching. The HE-960LC can be used as a process concentration meter, and also to monitor changes in the concentration of specified chemicals.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Wide range compatibility:
0 - 1000 μS/cm, 0 - 10000 μS/cm (Sensor FS-07F). - Automatic display range switching
- Accommodates various types of temperature compensation
- Concentration conversion function
- Chemical resistant two-electrode carbon sensor
| Model | HE-960LC | ||
|---|---|---|---|
| Measurement range | 0 - 1000 μS/cm (cell constant: 0.1/cm)* | ||
| 0 - 10000 μS/cm (cell constant: 1/cm)* | |||
| Repeatability | Cell constant | 0.1/cm | 1.0/cm |
| 0 to 1000 µS/cm | +/- 0.5% FS | - | |
| 0 to 2000 µS/cm | - | +/- 0.5% FS | |
| 2000 to 10000 µS/cm | - | +/- 0.5% FS | |
| 0.0 to 100 deg.C | +/- 0.5 deg.C | ||
* Measurement range of raw conductivity
Schematics
