HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity meter

Perfect for Slurry concentration control

It is effective to keep the dilution of Slurry constant. Maintaining an appropriate conductivity value contributes to process stability in the wafer polishing process. Even highly viscous sample liquids such as CMP Slurry can be measured without problems because they use a sensor structure that reduces the risk of the sample liquid sticking to the electrodes. In addition, the sensor is made of a wetted material with excellent chemical resistance, which meets the cleanliness requirements of semiconductor processes. In addition to the above, it can also be used for introduction at the semiconductor process development stage and conductivity control of special chemicals.

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

High accuracy / High stability

  • Measurement range : 0 to 2,000 μS/cm , 0 to 10,000 μS/cm
  • Repeatability : ± 0.5% F/S , ± 1.0% F/S

Metal contamination free

Since special carbon is used for the electrode material, there is no need to worry about metal contamination elution.

Equipped with concentration conversion function

Two types of concentration conversion are possible by inputting the relationship between the chemical concentration and conductivity and the temperature characteristics.
It is especially suitable for dilution control of low-concentration chemicals.

Space saving

The degree of freedom in installation layout is improved by downsizing from our conventional conductivity sensor.

 

Example of installation

 

■Specification conveter

Product nameConductivity meter
ModelHE-960LF
Measurement methodElectrode type(2-electrode method)
Temperature
specifications sensor
Platinum resistance 1000Ω/℃
Measurement
range
Cell constant0.1/cm1.0/cm
Conductivity0.00 to 20.00μS/cm0.0 to 200.0μS/cm
0.0 to 200.0μS/cm0 to 2000μS/cm
0 to 1000μS/cm0 to 10000μS/cm
*Measuring range of raw conductivity Switched with setting change
Temperature0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected.
Concentration
conversion
Option 1,20 to 10.000% Conversion formula is defined by user
(temperature compensation and concentration conversion)
RepeatabilityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00μS/cm range0.0 to 200.0μS/cm rangeWithin ±0.5% full scale
0.0 to 200.0μS/cm range0 to 2000μS/cm range
0 to 1000μS/cm range0 to 10000μS/cm rangeWithin ±1.0% full scale
Temperature±0.5℃
ConditionEquivalent input
LinearityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00μS/cm range0.0 to 200.0μS/cm rangeWithin ±0.5% full scale
0.0 to 200.0μS/cm range0 to 2000μS/cm range
0 to 1000μS/cm range0 to 10000μS/cm rangeWithin ±1.0% full scale
Temperature±0.5℃
ConditionEquivalent input
Transmission outputNumber of output:4
DC4 to 20mA / 0 to 20mA input/output isolated type
Maximum load resistance : 900Ω
Transmission output range : Free setting within measuring range
(Negative terminals of each transmission output channel are connected inside and thus
have the same electrical potential.)
Contact outputNumber of relay:5
ALARM contact R1,R2,R3 and R4
Contact type relay : Relay contact, SPST (1a)
Contact rating:240 V AC,1 A or 30 V DC, 1 A(resistance load)
Contact function Upper or lower ON/OFF alarm each measurement items.
Contact action Closed when status is in the event.
Opened when any erroneous status is normal or power is down.
R1,R2 and R3 share a common terminal.
Self diagnosis contact RF
Contact type : relay contact , SPDT (1c)
Contact rating:240 V AC,1 A or 30 V DC, 1 A(resistance load)
C-NO contact action : Closed when status is normal. Opened when any erroneous status is
detected or power is down. R4 and RF share a common terminal.
Contact inputNumber of input:1
Contact type:open collector. No-voltage contact
Function : Hold command
Communication outputRS-485 communication
Self-checkSensor diagnosis (Short-circuit and disconnection of the temperature sensor).
Converter error
Temperature
compensation
of conductivity
● Arbitrary temperature coefficient entry
(reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃)
● Arbitrary temperature compensation formula entry
(reference temperature : 25℃, formula is defined by user)
● No temperature compensation is performed.
Temperature
compensation range
0 to 100℃
The temperature compensation under 0℃ and over 100℃ is expanded by a function
Ambient temperature5 to 45℃
Relative humidity-25 to 65℃
Power supplyRated voltage 24 V DC, 10W (max.)
StructureIndoor-use panel installation type
Panel case : ABS, terminal : PBT
Panel : IP65 dust and water proof structure
Conforming standardsCE MarkingEMC Directive : EN61326-2-3
FCC RuleFCC Part15
MassApprox. 550g
External dimensions96 (W) × 96 (H) × 115 (D) mm
Case depth : approx. 105mm (when panel-mounted)
Compatible sensorsFS-09F-1/2

 

■Specification sensor

ModelFS-09F-1/2FS-09F-1/2-200
Wetted materialGlass carbon, PFA. Kalrez® 6375
pipe size1/2 inch
Flow rate0L/min to 10
Keep enough flow rate to measure latest sample.
Sample pressure0 to 0.3MPa (Temperature : 20 to 30 degree℃)
Sample temperature20~30 degree℃
If the difference between the ambient temperature
and the sample liquid temperature is 5 degree℃,
a measurement error of about 1 degree℃ will occur.
Cable lengthApprox. 3.5m

 

Dimensions (mm)


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